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NEW
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smartWLI-prime
"dual Z-axis" instrument for 3D surface profiling
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with high-resolution
small Z-ranges and
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<100nm resolution
large Z-ranges, alternatively
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As of November 2015, WinWinTec will distribute an
optical 3D profiling instrument branded "smartWLI" with two Z-drives
integrated for the alternative measurement of
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1.
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material samples with big measurement range – up to 100mm,
resolution down to <100nm – and
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2.
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material samples without large Z-axis measurement range
requirements, but high resolution requirements - by piezo
Z-actor, measurement range up to 400µm, resolution down
to 0.1nm in PSI mode.
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The dual Z-axis measurement system is consisting
of a motorized Z-actor with a vertical measurement range up to
100mm (resolution <100nm, replacing the manual Z-actor of the
standard smartWLI-prime instrument) and the standard piezo Z-actor
with a vertical measurement range of up to 400µm (resolution down
to 0.1nm in PSI mode and 1nm in VSI mode), in a pick-a-pack system
setup.
With this setup, the instrument is suitable as
much for the 3D material surface measurement with high-resolution
small Z-range and <100nm resolution large Z-ranges, alternatively,
in combination with different interference objective magnifications
(from 2.5x to 100x) and extremely fast smartWLI_VIS measurement
software.
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